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Epitaxial growth of 3CSiC on Si(111) from hexamethyldisilane

✍ Scribed by C.H. Wu; C. Jacob; X.J. Ning; S. Nishino; P. Pirouz

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 935 KB
Volume: 158
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(95)00464-5

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