✦ LIBER ✦

Energetics for bonding and detachment steps in etching of Si by Cl

✍ Scribed by Timur Halicioglu; Deepak Srivastava

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Calculated energetics for adsorption and

✍ Halicioglu, Timur 📂 Article 📅 2001 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 359 KB

Computed energetics for etching of the S

✍ Stephen P. Walch 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 522 KB

Formation of Well-Ordered Step Structure

✍ Imanishi, A.; Nagai, T.; Nakato, Y. 📂 Article 📅 2004 🏛 American Chemical Society 🌐 English ⚖ 419 KB

Reduction of bonding constraints by self

✍ G. Lucovsky; J.C. Phillips 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 297 KB

[IEEE 2014 IEEE International Meeting fo

✍ Takemura, K.; Morimoto, M.; Nishida, S.; Liang, J.; Shigekawa, N. 📂 Article 📅 2014 🏛 IEEE ⚖ 667 KB

Procedure for energetic utilization by i

📂 Article 📅 2003 🏛 Elsevier Science ⚖ 262 KB