Calculated energetics for adsorption and desorption steps during etching of Si(110) surface by Cl

✍ Scribed by Halicioglu, Timur

• Book ID: 121733641
• Publisher: AVS (American Vacuum Society)
• Year: 2001
• Tongue: English
• Weight: 359 KB
• Volume: 19
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.1322650