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Computed energetics for etching of the Si(1 0 0) surface by F and Cl atoms

✍ Scribed by Stephen P. Walch

Book ID: 117216085
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 522 KB
Volume: 496
Category: Article
ISSN: 0039-6028
DOI: 10.1016/s0039-6028(01)01381-4

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