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Formation of Well-Ordered Step Structures on Si(111) by a Combination of Chemical Etching and Surface Scratching for Producing Macrosized Patterns

✍ Scribed by Imanishi, A.; Nagai, T.; Nakato, Y.


Book ID
127020399
Publisher
American Chemical Society
Year
2004
Tongue
English
Weight
419 KB
Volume
108
Category
Article
ISSN
0022-3654

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