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Electroplating to visualize defects in Al2O3 thin films grown using atomic layer deposition

✍ Scribed by Yadong Zhang; Jacob A. Bertrand; Ronggui Yang; Steven M. George; Y.C. Lee


Book ID
108290348
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
758 KB
Volume
517
Category
Article
ISSN
0040-6090

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