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Studies on the morphology of Al2O3 thin films grown by atomic layer epitaxy

✍ Scribed by Mikko Ritala; Heini Saloniemi; Markku Leskelä; Thomas Prohaska; Gernot Friedbacher; Manfred Grasserbauer

Book ID: 108388888
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 889 KB
Volume: 286
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(95)08524-6

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