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AFM and STM studies on In2O3 and ITO thin films deposited by atomic layer epitaxy

✍ Scribed by Timo Asikainen; Mikko Ritala; Markku Leskelä; Thomas Prohaska; Gernot Friedbacher; Manfred Grasserbauer

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 636 KB
Volume: 99
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(96)00110-9

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