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Electron cyclotron resonance plasma enhanced chemical vapour deposition and optical properties of SiOx thin films

✍ Scribed by Pavel V Bulkin; Pieter L Swart; Beatrys M Lacquet


Book ID
117149070
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
216 KB
Volume
226
Category
Article
ISSN
0022-3093

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