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Electron-beam exposure characteristics of a novel Ru-PMMA composite resist

✍ Scribed by M.D.R. Thomas; D.G. Hasko; H. Ahmed; D.B. Brown; B.F.G. Johnson

Book ID
114155800
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
309 KB
Volume
41-42
Category
Article
ISSN
0167-9317

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