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Insolubilization mechanism and lithographic characteristics of a negative electron beam resist iodinated polystyrene

✍ Scribed by T. Ueno; H. Shiraishi; S. Nonogaki

Publisher: John Wiley and Sons
Year: 1984
Tongue: English
Weight: 677 KB
Volume: 29
Category: Article
ISSN: 0021-8995
DOI: 10.1002/app.1984.070290121

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