✦ LIBER ✦
Crosslinked PMMA as a high-resolution negative resist for electron beam lithography and applications for physics of low-dimensional structures
✍ Scribed by Zailer, I; Frost, J E F; Chabasseur-Molyneux, V; Ford, C J B; Pepper, M
- Book ID
- 115518454
- Publisher
- Institute of Physics
- Year
- 1996
- Tongue
- English
- Weight
- 238 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0268-1242
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