✦ LIBER ✦
A novel fabrication technique of T-shaped gates using an EGMEA and PMIPK multi-layer resist system and a single-step electron-beam exposure
✍ Scribed by Yeong-Lin Lai; Yeong-Kang Lai; Chun-Yen Chang; Edward Y. Chang
- Book ID
- 114155855
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 315 KB
- Volume
- 41-42
- Category
- Article
- ISSN
- 0167-9317
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