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Electromigration failure modes in damascene copper interconnects

✍ Scribed by L. Arnaud; R. Gonella; G. Tartavel; J. Torrès; C. Gounelle; Y. Gobil; Y. Morand

Book ID: 108362378
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 479 KB
Volume: 38
Category: Article
ISSN: 0026-2714
DOI: 10.1016/s0026-2714(98)00122-x

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