Electrical resistivity of Ti–Zn mixed oxide thin films deposited by atomic layer deposition

✍ Scribed by S.K. Hazra; L. Borgese; S. Federici; E. Bontempi; M. Ferrari; V. Ferrari; J.R. Plaisier; X. Santarelli; G. Zerauschek; A. Lausi; L.E. Depero

• Book ID: 113937660
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 502 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2012.03.131