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Electrical properties and microstructure of ternary Ge/Ti/Al ohmic contacts to p-type 4H–SiC

✍ Scribed by Tsukimoto, S.; Sakai, T.; Murakami, Masanori

Book ID: 111909942
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 871 KB
Volume: 96
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1797546

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