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Mechanism of ohmic behavior of Al/Ti contacts to p-type 4H-SiC after annealing

✍ Scribed by Johnson, Brian J.; Capano, Michael A.

Book ID: 111909938
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 482 KB
Volume: 95
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1707215

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