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Simultaneous Formation of Ni/Al Ohmic Contacts to Bothn- andp-Type 4H-SiC

✍ Scribed by Kazuhiro Ito; Toshitake Onishi; Hidehisa Takeda; Kazuyuki Kohama; Susumu Tsukimoto; Mitsuru Konno; Yuya Suzuki; Masanori Murakami

No coin nor oath required. For personal study only.

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Long-term stability of Ni–silicide ohmic

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Enhancement of the Stability of Ti and N

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