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Electrical Measurement of Feature Sizes in MOS Si/sup 2/-Gate VLSI Technology

✍ Scribed by Takacs, D.; Muller, W.; Schwabe, U.

Book ID: 119797959
Publisher: IEEE
Year: 1980
Tongue: English
Weight: 964 KB
Volume: 15
Category: Article
ISSN: 0018-9200
DOI: 10.1109/jssc.1980.1051417

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