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Electrical measurement of feature sizes in MOS Si2-gate VLSI technology

✍ Scribed by Takacs, D.; Muller, W.; Schwabe, U.

Book ID: 114593471
Publisher: IEEE
Year: 1980
Tongue: English
Weight: 539 KB
Volume: 27
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1980.20041

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