✦ LIBER ✦
A test structure for the electrical measurement of the misalignment between gate and diffusion regions in MOS/LSI circuits : Alicja Gluzinska, Andrzej A. Czerwinski and Maria Czerwinska. Electron Technol., Warsaw17 (1/2), 39 (1984)
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 132 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0026-2714
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