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Electrical characterization and modification of a microelectroMechanical system (MEMS) for extended mechanical reliability and fatigue testing

✍ Scribed by D. Meunier; R. Desplats; J. Benbrik; G. Perez; C. Pellet; D. Etsève; B. Benteo


Book ID
108362371
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
340 KB
Volume
38
Category
Article
ISSN
0026-2714

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