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A capacitance and optical method for the static and dynamic characterization of micro electro mechanical systems (MEMS) devices

✍ Scribed by Eleonora Ferraris; Irene Fassi; Biagio De Masi; Richard Rosing; Andrew Richardson

Publisher: Springer-Verlag
Year: 2006
Tongue: English
Weight: 784 KB
Volume: 12
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-006-0163-6

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