✦ LIBER ✦
Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-)MEMS devices
✍ Scribed by Jourdain, A; Moor, P De; Baert, K; Wolf, I De; Tilmans, H A C
- Book ID
- 121463873
- Publisher
- Institute of Physics
- Year
- 2005
- Tongue
- English
- Weight
- 477 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0960-1317
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