✦ LIBER ✦

Electrical characteristics and thermal stability of n[sup +] polycrystalline- Si/ZrO[sub 2]/SiO[sub 2]/Si metalâoxideâsemiconductor capacitors

✍ Scribed by Lim, Kwan-Yong; Park, Dae-Gyu; Cho, Heung-Jae; Kim, Joong-Jung; Yang, Jun-Mo; Choi, II-Sang; Yeo, In-Seok; Park, Jin Won

Book ID: 120435484
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 631 KB
Volume: 91
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1425073

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