✦ LIBER ✦
Interface engineering of a ZrO[sub 2]/SiO[sub 2]/Si layered structure by in situ reoxidation and its oxygen-pressure-dependent thermal stability
✍ Scribed by Watanabe, Heiji
- Book ID
- 121661475
- Publisher
- American Institute of Physics
- Year
- 2001
- Tongue
- English
- Weight
- 300 KB
- Volume
- 78
- Category
- Article
- ISSN
- 0003-6951
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