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Effects of substrates on the structural properties of ZnO films deposited by rf magnetron sputtering

✍ Scribed by Chun Nam Cha; Mu Hee Choi; Tae Young Ma

Book ID
116760475
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
583 KB
Volume
15
Category
Article
ISSN
1369-8001

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Structural evolution of ZnO films deposi
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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec