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Effects of Annealing on Luminescence of ZnO Films Deposited on Si Substrates by RF Magnetron Sputtering

✍ Scribed by Zhaoyuan, Ning; Huoquan, Li

Book ID
126638847
Publisher
IOP Publishing
Year
2005
Tongue
English
Weight
435 KB
Volume
7
Category
Article
ISSN
1009-0630

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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec