Effects of reactor geometry and frequency coupling on dual-frequency capacitively coupled plasmas

✍ Scribed by Bi, Zhen-Hua; Dai, Zhong-Ling; Zhang, Yu-Ru; Liu, Dong-Ping; Wang, You-Nian

• Book ID: 121343837
• Publisher: Institute of Physics
• Year: 2013
• Tongue: English
• Weight: 674 KB
• Volume: 22
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/22/5/055007