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Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges

✍ Scribed by Lafleur, T.; Booth, J. P.

Book ID: 120197117
Publisher: American Institute of Physics
Year: 2013
Tongue: English
Weight: 487 KB
Volume: 102
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.4802241

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