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The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

✍ Scribed by Schulze, J; Schüngel, E; Donkó, Z; Czarnetzki, U


Book ID
121480974
Publisher
Institute of Physics
Year
2011
Tongue
English
Weight
811 KB
Volume
20
Category
Article
ISSN
0963-0252

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