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Charge dynamics in capacitively coupled radio frequency discharges

✍ Scribed by Schulze, J; Schüngel, E; Donkó, Z; Czarnetzki, U


Book ID
120232669
Publisher
Institute of Physics
Year
2010
Tongue
English
Weight
497 KB
Volume
43
Category
Article
ISSN
0022-3727

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