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A hybrid, one-dimensional model of capacitively coupled radio-frequency discharges

✍ Scribed by Heil, Brian G; Brinkmann, Ralf Peter; Czarnetzki, Uwe


Book ID
121480943
Publisher
Institute of Physics
Year
2008
Tongue
English
Weight
593 KB
Volume
41
Category
Article
ISSN
0022-3727

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