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Electron Beams in Capacitively Coupled Radio-Frequency Discharges

✍ Scribed by Schulze, J.; Heil, B.G.; Luggenholscher, D.; Czarnetzki, U.

Book ID: 118180666
Publisher: IEEE
Year: 2008
Tongue: English
Weight: 482 KB
Volume: 36
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2008.924404

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