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Simulation of Capacitively Coupled Single- and Dual-Frequency RF Discharges

โœ Scribed by Lee, J.K.; Babaeva, N.Y.; Kim, H.C.; Manuilenko, O.V.; Shon, J.W.

Book ID
121651663
Publisher
IEEE
Year
2004
Tongue
English
Weight
285 KB
Volume
32
Category
Article
ISSN
0093-3813

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Breakdown mechanism of capacitively coup
Breakdown mechanism of capacitively coupled RF discharges
โœ Masafumi Shoji; Masumi Sato ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 284 KB

Measured breakdown characteristics of capacitively coupled RF discharges are compared with numerical simulations performed under different boundary conditions at the electrode. When a pair of glass-covered aluminum disks are used in the breakdown measurement of N 2 and Ar gases at RF frequency of 13