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Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges

✍ Scribed by Liu, Yong-Xin; Zhang, Quan-Zhi; Liu, Jia; Song, Yuan-Hong; Bogaerts, Annemie; Wang, You-Nian

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Experimental validation and simulation o

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Electron Beams in Capacitively Coupled R

✍ Schulze, J.; Heil, B.G.; Luggenholscher, D.; Czarnetzki, U. 📂 Article 📅 2008 🏛 IEEE 🌐 English ⚖ 482 KB

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✍ Lafleur, T.; Booth, J. P. 📂 Article 📅 2013 🏛 American Institute of Physics 🌐 English ⚖ 487 KB

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✍ Liu, D. W.; Iza, F.; Kong, M. G. 📂 Article 📅 2008 🏛 American Institute of Physics 🌐 English ⚖ 477 KB

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✍ Tong, L. Z; Nanbu, K 📂 Article 📅 2006 🏛 EDP Sciences 🌐 English ⚖ 224 KB

Electron beams in asymmetric capacitivel

✍ Schulze, J; Heil, B G; Luggenhölscher, D; Mussenbrock, T; Brinkmann, R P; Czarne 📂 Article 📅 2008 🏛 Institute of Physics 🌐 English ⚖ 328 KB