Breakdown mechanism of capacitively coupled RF discharges

✍ Scribed by Masafumi Shoji; Masumi Sato

• Book ID: 101293840
• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 284 KB
• Volume: 130
• Category: Article
• ISSN: 0424-7760
• DOI: 10.1002/(sici)1520-6416(200001)130:1<8::aid-eej2>3.0.co;2-3

✦ Synopsis

Measured breakdown characteristics of capacitively coupled RF discharges are compared with numerical simulations performed under different boundary conditions at the electrode. When a pair of glass-covered aluminum disks are used in the breakdown measurement of N 2 and Ar gases at RF frequency of 13.56 MHz, the peculiar bend in the left branch of the minimum of V-shaped breakdown curves is not observed, suggesting the absence of secondary electron emission. For the treated boundary condition of the electron density n, the simulation with the zero gradient gives satisfactory agreement with the experimental V-shaped curves, while the simulation with n = 0 is shown to be effective in the region of small electric fields. The development of RF breakdown is explained based on the simulation for spatiotemporal profiles of n.