Collisionless sheaths of capacitively coupled RF discharge at various frequencies

✍ Scribed by D. S. Nikandrov; L. D. Tsendin

• Book ID: 111449508
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2006
• Tongue: English
• Weight: 267 KB
• Volume: 32
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/s1063785006080244