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Plasma impedance in a narrow gap capacitively coupled RF discharge

✍ Scribed by Bera, K.; Chen-An Chen, ; Vitello, P.

Book ID: 118203401
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 189 KB
Volume: 30
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2002.1003965

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