Polymer-Like C:H Thin Film Coating of Nanopowders in Capacitively Coupled RF Discharge

✍ Scribed by A. Kouprine; F. Gitzhofer; M. Boulos; A. Fridman

• Book ID: 111603257
• Publisher: Springer
• Year: 2004
• Tongue: English
• Weight: 799 KB
• Volume: 24
• Category: Article
• ISSN: 0272-4324
• DOI: 10.1023/b:pcpp.0000013198.39742.38