✦ LIBER ✦
Variation of Ion Current Flowing into Double Probes with Coating of Organic Thin Film in rf Discharge Plasma
✍ Scribed by Yamaguchi, Shinji; Sawa, Goro; Ieda, Masayuki
- Book ID
- 125489207
- Publisher
- Institute of Pure and Applied Physics
- Year
- 1987
- Tongue
- English
- Weight
- 900 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0021-4922
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