Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge

✍ Scribed by Xu, Lin; Chen, Lee; Funk, Merritt; Ranjan, Alok; Hummel, Mike; Bravenec, Ron; Sundararajan, Radha; Economou, Demetre J.; Donnelly, Vincent M.

• Book ID: 124084397
• Publisher: American Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 395 KB
• Volume: 93
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.3062853