Measurements of heat flux distribution toward substrate by means of the LiNbO3 interferometer, and electron density in a capacitively coupled rf discharge plasma

✍ Scribed by S. Mukaigawa; S. Kanno; K. Takaki; T. Fujiwara

• Book ID: 114167178
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 150 KB
• Volume: 206
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(03)00847-4