Diagnostic studies of species concentrations in a capacitively coupled RF plasma containing CH 4 -H 2 -Ar

✍ Scribed by Gathen, V Schulz-von der; Röpcke, J; Gans, T; Käning, M; Lukas, C; Döbele, H F

• Book ID: 120900950
• Publisher: Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 161 KB
• Volume: 10
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/10/3/318