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Production of active species in a common flowing post-discharge of an Ar-N 2 plasma and an Ar-H 2 -CH 4 plasma

✍ Scribed by Ricard, A; Malvos, H; Bordeleau, S; Hubert, J


Book ID
121486331
Publisher
Institute of Physics
Year
1994
Tongue
English
Weight
364 KB
Volume
27
Category
Article
ISSN
0022-3727

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