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Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen

✍ Scribed by Diomede, P; Longo, S; Economou, D J; Capitelli, M

Book ID: 111983136
Publisher: Institute of Physics
Year: 2012
Tongue: English
Weight: 479 KB
Volume: 45
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/45/17/175204

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