✦ LIBER ✦

Different Modes of a Capacitively Coupled Radio-Frequency Discharge in Methane

✍ Scribed by Schweigert, I. V.

Book ID: 118192209
Publisher: The American Physical Society
Year: 2004
Tongue: English
Weight: 181 KB
Volume: 92
Category: Article
ISSN: 0031-9007
DOI: 10.1103/physrevlett.92.155001

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Different modes of capacitively coupled

Different modes of capacitively coupled radio-frequency discharge in methane

✍ I. V. Schweigert 📂 Article 📅 2004 🏛 Springer 🌐 English ⚖ 115 KB

Sheath motion in a capacitively coupled

Sheath motion in a capacitively coupled radio frequency discharge

✍ Wood, B.P.; Lieberman, M.A.; Lichtenberg, A.J. 📂 Article 📅 1991 🏛 IEEE 🌐 English ⚖ 824 KB

Electron Beams in Capacitively Coupled R

Electron Beams in Capacitively Coupled Radio-Frequency Discharges

✍ Schulze, J.; Heil, B.G.; Luggenholscher, D.; Czarnetzki, U. 📂 Article 📅 2008 🏛 IEEE 🌐 English ⚖ 482 KB

Diagnostic of capacitively coupled radio

Diagnostic of capacitively coupled radio frequency plasma by homogeneous discharge model

✍ B. Bora; H. Bhuyan; M. Favre; E. Wyndham; H. Chuaqui 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 193 KB

Transition between different modes of a

Transition between different modes of a capacitively coupled radio frequency discharge in CH/sub 4/ in one- and two-dimensional PIC-MCC Simulations

✍ Schweigert, I.V.; Alexandrov, A.L. 📂 Article 📅 2005 🏛 IEEE 🌐 English ⚖ 525 KB

Frequency coupling in dual frequency cap

Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas

✍ Gans, T.; Schulze, J.; OConnell, D.; Czarnetzki, U.; Faulkner, R.; Ellingboe, A. 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 515 KB