✦ LIBER ✦
Transition between different modes of a capacitively coupled radio frequency discharge in CH/sub 4/ in one- and two-dimensional PIC-MCC Simulations
✍ Scribed by Schweigert, I.V.; Alexandrov, A.L.
- Book ID
- 118202145
- Publisher
- IEEE
- Year
- 2005
- Tongue
- English
- Weight
- 525 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0093-3813
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