✦ LIBER ✦
Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor
✍ Scribed by Boeuf, J. P.; Pitchford, L. C.
- Book ID
- 118147867
- Publisher
- The American Physical Society
- Year
- 1995
- Tongue
- English
- Weight
- 672 KB
- Volume
- 51
- Category
- Article
- ISSN
- 1063-651X
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