✦ LIBER ✦

Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge

✍ Scribed by Q. Zhang; W. Jiang; L. Hou; Y. Wang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of discharge voltage on capacitiv

✍ Diomede, P; Capitelli, M; Longo, S 📂 Article 📅 2005 🏛 Institute of Physics 🌐 English ⚖ 318 KB

On the electrical asymmetry effect in la

✍ Bienholz, S; Styrnoll, T; Awakowicz, P 📂 Article 📅 2014 🏛 Institute of Physics 🌐 English ⚖ 664 KB

Frequency dependence of the electrical a

✍ Lafleur, T.; Booth, J. P. 📂 Article 📅 2013 🏛 American Institute of Physics 🌐 English ⚖ 487 KB

[IEEE 2012 IEEE 39th International Confe

✍ Atanasova, M.; Degrez, G.; Benova, E.; Carbone, E. A. D.; Mihailova, D.; van der 📂 Article 📅 2012 🏛 IEEE ⚖ 97 KB

The effects of process conditions on the

✍ Liu, Xiang-Mei; Song, Yuan-Hong; Jiang, Wei; Yi, Lin 📂 Article 📅 2013 🏛 IOP Publishing 🌐 English ⚖ 937 KB

[IEEE 20th International Symposium on Di

✍ Schade, E.; Shang, W.; Shmelev, D.; Kleberg, I. 📂 Article 📅 2002 🏛 IEEE ⚖ 289 KB